Idiphozithi
Thola imininingwane futhi usheshise inqubo yokuthuthukisa.
I-Advanced Energy iletha ukuphakelwa kwamandla nokulawula izixazululo zezinhlelo zokusebenza zokubekwa kwefilimu emincane emincane namajiyometri wedivayisi.Ukuze uxazulule izinselele zokucubungula ama-wafer, izixazululo zethu zokuguqulwa kwamandla ezinembayo zikuvumela ukuthi uthuthukise ukunemba kwamandla, ukunemba, isivinini, kanye nenqubo yokuphindaphinda.
Sinikeza ububanzi obubanzi befrikhwensi ye-RF, izinhlelo zamandla e-DC, amazinga okukhipha amandla enziwe ngokwezifiso, ubuchwepheshe obufanayo, nezixazululo zokuqapha izinga lokushisa le-fiber optic ezikwenza ukwazi ukulawula kangcono inqubo ye-plasma.Siphinde futhi sihlanganise i-Fast DAQ™ kanye nokutholwa kwedatha yethu kanye nohlelo lokufinyeleleka ukuze sinikeze ulwazi lwenqubo futhi sisheshise inqubo yokuthuthukisa.
Funda kabanzi mayelana nezinqubo zethu zokukhiqiza ama-semiconductor ukuze uthole isixazululo esifanelana nezidingo zakho.
Inselele Yakho
Kusukela kumafilimu asetshenziselwe ukwenza iphethini yobukhulu besekethe ehlanganisiwe ukuya kumafilimu abambayo nawokubamba ukushisa (izakhiwo zikagesi), kuya kumafilimu ensimbi (ukuxhumana), izinqubo zakho zokubeka zidinga isilawuli seleveli ye-athomu — hhayi esicini ngasinye kuphela kodwa kuso sonke iwafa.
Ngale kwesakhiwo ngokwaso, amafilimu akho afakiwe kufanele abe yikhwalithi ephezulu.Kudingeka babe nesakhiwo sokusanhlamvu esifiselekayo, ukufana, nokujiya okuvumelanayo, futhi bangabi nalutho - futhi lokho ngaphezu kokuhlinzeka ngokucindezeleka komshini (okucindezelayo nokuqinile) kanye nezakhiwo zikagesi.
Ubunkimbinkimbi buqhubeka bukhula kuphela.Ukuze ubhekane nemikhawulo ye-lithography (ama-sub-1X nm nodes), amasu okuzenzela amaphethini aphindwe kabili nakane adinga inqubo yakho yokubeka ukuze ukhiqize futhi ukhiqize kabusha iphethini kuwo wonke amawafa.
Isixazululo Sethu
Uma usebenzisa izinhlelo zokusebenza ezibucayi kakhulu namajiyometri wedivayisi, udinga umholi wemakethe onokwethenjelwa.
Ukulethwa kwamandla e-RF ye-Advanced Energy's Advanced kanye nobuchwepheshe bokufanisa obunesivinini esiphezulu bukuvumela ukuthi wenze ngendlela oyifisayo futhi ulungiselele ukunemba kwamandla, ukunemba, isivinini, kanye nenqubo yokuphindaphinda okudingekayo kuzo zonke izinqubo zokubeka i-PECVD ne-PEALD ezithuthukisiwe.
Sebenzisa ubuchwepheshe bethu be-DC generator ukuze ulungise impendulo yakho ye-arc elungisekayo, ukunemba kwamandla, isivinini, kanye nenqubo yokuphindaphinda okudingekayo ye-PVD (i-sputtering) kanye nezinqubo zokubeka ze-ECD.
Izinzuzo
● Ukuzinza kwe-plasma okuthuthukisiwe kanye nokuphindaphinda kwenqubo kwandisa isivuno
● Ukulethwa okunembile kwe-RF ne-DC ngokulawulwa kwedijithali okugcwele kusiza ukuthuthukisa ukusebenza kahle kwenqubo
● Ukusabela okusheshayo ekushintsheni kwe-plasma nokuphathwa kwe-arc
● Ukushaya kwamaleveli amaningi ngokushuna kwamafrikhwensi okuguquguqukayo kuthuthukisa ukukhethwa kwezinga le-etch
● Ukusekelwa komhlaba wonke kuyatholakala ukuze kuqinisekiswe isikhathi esiphezulu nokusebenza komkhiqizo